Projection micro-stereolithography using digital micro-mirror dynamic mask
نویسندگان
چکیده
We present in this paper the development of a high-resolution projection micro-stereolithography (P SL) process by using the Digital Micromirror Device (DMDTM, Texas Instruments) as a dynamic mask. This unique technology provides a parallel fabrication of complex three-dimensional (3D) microstructures used for micro electro-mechanical systems (MEMS). Based on the understanding of underlying mechanisms, a process model has been developed with all critical parameters obtained from the experimental measurement. By coupling the experimental measurement and the process model, the photon-induced curing behavior of the resin has been quantitatively studied. The role o r d ©
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